Beyond state of the art: Tailored Waveform Biasing

Meet the Experts: Professor Erwin Kessels Erwin Kessels is a professor at Eindhoven University of Technology and has been active in (plasma-enhanced) ALD since 2002. His research has since expanded to ALE and area-selective ALD. He has received several awards,...
HPEM: The Engine Driving QVT

HPEM: The Engine Driving QVT

In plasma processing, perfection is fragile. One small, unpredictable change in gas pressure or power can undo an otherwise optimised process. To move beyond trial-and-error, engineers and researchers rely on simulation. Choosing the Quantemol Virtual Tool (QVT) means...