Q-VT Validation

In the core engine of Quantemol-VT lies a powerful Hybrid Plasma Equipment Model (HPEM) code. This code has a proven track of publications, validating it with experimental data and other methods. Here you can find some publications in relevant sections, which seem to be frequently asked about.

Model overview:







High aspect ratio deep Silicon etching


Magnetron Sputtering


Link to feature profile simulations


*Wafer damage*