Quantemol-Virtual Tool (Q-VT) is an expert software system for the simulation of industrial plasma processing tools. Q-VT builds upon the comprehensively validated Hybrid Plasma Equipment Model (HPEM) codes developed by renowned plasma physicist Professor Mark Kushner from University of Michigan for simulating non-equilibrium low pressure (< 1Torr) plasma processes. Q-VT includes an intuitive user interface, data visualisation and analysis capabilities, and convenient job/batch management.



“I have enjoyed using the Quantemol Virtual Tool (QVT) as a user-friendly front end to the Hybrid Plasma Equipment Model (HPEM) of Professor Mark Kushner. It is easy to define geometries to be modelled by the software. All of the features of the HPEM are available and the settings for these features are integrated into one user interface. After the definition of the geometry of a plasma reactor, the workflow includes setting the input parameters to the system, such as those necessary for the coupling of electromagnetic energy into the reactor, as well as initial gas compositions in the chamber, gas flow rates and data for chemical reactions occurring in the plasma. Finally, a large range of output plasma parameters such as concentrations, fluxes, and temperatures of species can be displayed over the computation domain.”

Dr. Mark Stamminger
Heraeus Conamic

Applications of Q-VT include:

  • Tool design and development
  • Modeling of discharge and wafer-level chemistry kinetics
  • Model etch/deposition uniformity
  • Examine tilting effects (when used with additional feature scale profile model, specifically compatible with Synopsys software)
  • Large wafer size simulation (12 inches and more)

What Q-VT can model:

  • Plasma tool geometry alterations
  • Advanced volume and surface chemistries
  • Variation of key plasma state variables with process parameter changes
  • Ion flux on wafer level: ion energy/ angular distribution functions, and fluxes of all species along the wafer
  • Non-Maxwellian electron dynamics
  • Complex electromagnetic plasma interactions (current coils, permanent magnets, multi-frequency power supply, plasma circuit interactions)

Benefits of Q-VT

  • Experimentally validated simulation system
  • Experimentally validated simulation system focused on modeling plasma tools
  • User-friendly tool-like interface
  • Sets of validated plasma chemistries and cross-sections are provided with the licence
  • Example libraries include numerous chambers
  • Easy-to-use drawing tool for chamber design and modification: a tool simulation set-up service can be provided
  • Ability to model complex plasma phenomena with additional modules (dust/radiation transport, ion kinetics, external circuits, etc.)
  • Multi-run management system for managing large numbers of simulations
  • Advanced reactor scale visualisation of scalar and vector plasma properties
  • Experimental results importing
  • Ability to easily distribute and manage jobs over a cluster

If you already have HPEM code, please note Q-VT can be provided as an HPEM expert system wrapper. Please contact us for a discounted quotation; info@quantemol.com

Release 2.0

  • Update to Python 3 and recent versions of python modules
  • Displayed species and reactions in the chemistry tab can now be filtered by type, name etc.
  • There are now some chemistry consistency checks accessible via the Chemistry/Species tab. These check for example for missing ion-ion recombination or symmetric charge exchange reactions.
  • Custom species and cross-section imports
  • QDB API: There is now also a link to the QDB Chemistry Generator