In plasma processing, perfection is fragile. One small, unpredictable change in gas pressure or power can undo an otherwise optimised process.
To move beyond trial-and-error, engineers and researchers rely on simulation. Choosing the Quantemol Virtual Tool (QVT) means leveraging a system built on decades of scientific rigour. At its core is a simulation engine with a long and trusted pedigree: the Hybrid Plasma Equipment Model (HPEM).
QVT’s Foundational Reliability: The HPEM Core
QVT is the expert software system for simulating industrial plasma processing. Its core engine is the robust and highly verified HPEM code.
HPEM was developed by plasma physicist Professor Mark Kushner and his group at the University of Michigan. Crucially, the model has a proven, decades-long track record, having been validated against experimental data in countless publications. This established foundation is precisely why QVT users can trust their results; the engine is reliable, and the output is scientifically sound. HPEM is particularly effective for simulating low-temperature plasmas, which cover a myriad of advanced industrial applications, such as microchip fabrication.
The “Hybrid” Advantage: Speed Meets Science
The major hurdle in plasma simulation is the trade-off between speed (running complex studies quickly) and accuracy (capturing intricate plasma physics). The “Hybrid Model” is HPEM’s solution, enabling lightning-fast simulations while precisely capturing complex kinetic behaviours.
The key to this balance lies in how the model treats the electrons.
- The Fluid Model (For Speed): For large-scale, bulk properties of the plasma, such as particle densities and fluxes, QVT uses a faster, macroscopic fluid model. This approach quickly maps out the overall plasma structure and dynamics across the chamber.
- The Monte Carlo Simulation (For Accuracy): Plasma electrons are vital, as their energy distribution dictates the crucial chemical reactions taking place. When high accuracy is required for these reactions, QVT optionally calculates them using an electron Monte Carlo Simulation (MCS). The MCS is a highly detailed, kinetic technique used to derive key parameters like Electron Energy Distribution Functions (EEDFs), electron temperatures, and rate coefficients. Crucially, the MCS doesn’t start from scratch; it uses the densities and electric fields already provided by the fast fluid model, seamlessly blending speed with detailed physics.
This intelligent combination allows QVT to manage large simulation studies and deliver fast results without compromising the kinetic accuracy required for low-pressure processes.
Digital Visibility: What HPEM Enables in QVT
HPEM’s hybrid power enables QVT to act as your digital counterpart for industrial plasma processing, providing the deep insights needed to accelerate innovation and cut R&D costs.
QVT lets you model and predict complex plasma behaviour, taking you from concept to optimisation in a single, end-to-end system. It captures discharge and wafer-level chemistry with precision, including etch and deposition uniformity, feature-scale effects, and large-wafer behaviour. You can directly analyse wafer-level ion flux, energy and angular distributions, with the flexibility to extend the HPEM core through targeted add-on modules.
Powered by the highly verified HPEM engine, QVT pairs scientific rigour with an intuitive interface. The result is faster insight, a shorter learning curve, and reduced time-to-market for your next breakthrough.
Start Simulating Today
QVT, built on the robust HPEM core, is the validated, flexible, and powerful platform you need to visualise and understand intricate plasma chemistry.
Want to try QVT for free? Contact us today.
By Annie Laver
Annie Laver
SCIENTIFIC COMMUNICATIONS ADMINISTRATOR