How does Quantemol-P work?

The user need only specify a few basic inputs on the plasma properties (volume, power, pressure, temperature) and on the plasma chemistry (initial chemical composition of the plasma, flow rates, mole fractions).

The Quantemol-P expert system automatically generates a complete chemistry of the plasma which includes gas and surface reactions, and reactions with the chamber walls.

The reaction list is populated through an extensive database of molecular parameters, cross-sections and rates which is contained within the software. Missing data can be obtained and added to the database using Quantemol-N.

This model can be applied to a variety of plasma situations, including plasma etch reactors, plug flow reactors and continuously stirred-tank reactors. The plasma model in Quantemol-P is based on the zero-dimensional global-kinetics simulation code GLOBALKIN developed over a number of years by Kushner and co-workers.
A global model such as GLOBALKIN can apply to a variety of plasma situations, including flowing plasmas such as plug flow systems and well-mixed plasma reactors. You can find out more about Quantemol-P theoretical basis from the article: “Global plasma simulations using dynamically generated chemical models”, James J. Munro and Jonathan Tennyson, Journal of Vacuum Science and Technology A, 26, 865 (2008).