How does Quantemol-P work?
The user need only specify a few basic inputs on the plasma properties (volume, power, pressure, temperature) and on the plasma chemistry (initial chemical composition of the plasma, flow rates, mole fractions).
The Quantemol-P expert system automatically generates a complete chemistry of the plasma which includes gas and surface reactions, and reactions with the chamber walls.
The reaction list is populated through an extensive database of molecular parameters, cross-sections and rates which is contained within the software. Missing data can be obtained and added to the database using Quantemol-N.
Quantemol-P uses a zero-dimensional global model to simulate the plasma.
This model can be applied to a variety of plasma situations, including plasma etch reactors, plug flow reactors and continuously stirred-tank reactors.
Standard outputs are produced and plotted automatically. These outputs comprise of concentration of the various species, gas temperature, gas pressure as a function of time (for a well-mixed plasma reactor) or space (for flowing plasmas).
