Quantemol-D is a plasma simulation expert system. It wraps around the well-known HPEM codes.

The Hybrid Plasma Equipment Model (HPEM) is a comprehensive modeling platform developed by the CODPG for low pressure (< 10s Torr) plasma processing reactors. The HPEM is capable of addressing:

• Inductively Coupled Plasma (ICP) tools.
• Reactive Ion Etchers (RIE).
• Electron Cyclotron Resononance (ECR) sources.
• Magnetron sputter and Ionized Metal Physical Vapor Deposition (IMPVD).
• Remote Plasma Activated Chemical Vapor Deposition (RPACVD).
• Dust particle transport in plasma tools.

There are 2-d and 3-d versions of the HPEM.

This provides an easy to use Quantemol-D interface and making calculations simple but effective for non-experts.

Features include:

• Advanced palette design feature for easy re-design of tool – ‘paint’ your machine.
• Pre-installed with numerous existing simulations, MERIE, GEC cells, PVCVD etc. to build and mould to your own.
• Utilises all functions of the HPEM codes in a development enviroment, easy to use but with all the advanced features the expert requires.