What are the key advantages of Quantemol-D?
What range of problems can be tackled with Quantemol-D?
What do I actually buy with the license for Quantemol-D?
How is it easy to use Quantemol-D?
How can I order a demo-version of Quantemol-D?
What is the difference between single work station license and site license?
How does it help to predict charging damage?
What process pressure range can be modeled?
What is the difference between single workstation licence, site licence and research group licence?
What does Quantemol-D do?
Quantemol-D is an expert software system for the simulation of industrial plasma processes. Q-D builds upon the respected Hybrid Plasma Equipment Model (HPEM) codes developed by leading plasma physicist Professor Mark Kushner, adding a number of needed systems for both expert and non-expert users. Q-D includes user interface enhancements, extensive documentation and support, data visualisation, analysis, job control, batch process and design of experiment support.
What are the key advantages of Quantemol-D?
- Ease of use entry and evaluation of physical, machine and process parameters.
- Hybrid Plasma Equipment Model simulation system driver.
- Full HPEM and Tecplot file compatibility.
- 1D visualisation of wafer fluxes and plasma kinetics.
- 2D reactor scale visualisation of species and plasma properties.
- Reactor “painter” for machine design.
- Live, syntax checked, colour-coded views of HPEM input files.
- Job runner with single and simultaneous queuing and execution of simulations.
- Project views, for managing multiple machines & simulations.
- Example library including numerous reactors and chemistries.
What range of problems can be tackled with Quantemol-D?
You can simulate and design by simulation plasma tools like:
- Inductively Coupled Plasma (ICP) tools.
- Reactive Ion Etchers (RIE).
- Electron Cyclotron Resononance (ECR) sources.
- Magnetron sputter and Ionized Metal Physical Vapor Deposition (IMPVD).
- Remote Plasma Activated Chemical Vapor Deposition (RPACVD).
- Dust particle transport in plasma tool.
What do I actually buy with the license for Quantemol-D?
License and support fee apart from use of the software include installation, introductory training, annual support with 24 hours reply to your request. Quantemol Ltd team deals with your request as soon as possible and we target to get back with a solution withing 4 working days. Also you are updated with new versions of the Quantemol software during your license term. Therefore you can be sure that using a cutting edge technologies with Quantemol.
How is it easy to use Quantemol-D?
With every new version of the Quantemol software we continue to improve the interface and make it even more use friendly. Very simple inputs are used for all applications and outputs are usually presented in a convenient text or graphical format. We have the special option of manual tuning of the program for advanced users.
We can organize a web-demonstration of Quantemol applications during which you can find out more about Quantemol and see how the programs actually work. After you buy a license we will arrange an introductory training session for users. We are always in touch with clients and ready to answer any kinds of questions.
How can I order a demo-version of Quantemol-D?
To order a web demonstration please e-mail sales@quantemol.com or give us a call on +44(0)207 679 34 76.
What is the difference between single work station license and site license?
- “Single workstation licence”: Licence allowing the use of the software modules on a single computer which must be hosted by a single operating system installation. It may include multiple CPU.
- “Site licence”: Licence allowing install of the software on unlimited numbers of computers owned by the customer on the customer’s site and run simultaneously.
Does the model take into account differences due to use of different rf frequencies for plasma generation? How about use of Faraday shields?
Yes the model will treat the differences between rf frequencies and Faraday shields can be included.
How does it help to predict charging damage?
Ion and electron fluxes onto surfaces can be predicted. This combined with an understanding of surface conductivity will give a usable analysis of possible charge damage.
What kind of output do you get? Can you predict deposition rate, thickness and film property uniformity (e.g. index of refraction & optical loss), film composition, control of particulate contamination?
Outputs include 2D visualisations of all simulated parameters (such as species temperatures and concentrations, electromagnetic fields etc). Outputs also include surface fluxes and surface site fractions for any simulated species. Output can also include deposition of etch rates. Outputs such as thickness and film properties would need to be extrapolated from calculation results.
Typically, how long does it take to build a new reactor configuration? What skills are required, how user-friendly is it?
We have a user friendly graphical interface that allows the user to paint a 2D representation of the tool. Given an existing simulated chemistry and a description of the physics being modeled a new or adapted geometry can be created in say 10 mins.
What process pressure range can be modeled?
Quantemol-D can handle pressures up to about 10 Torr and as low as about 5 mTorr.
What is the difference between single workstation licence, site licence and research group licence?
Single workstation software licence allows only one user at a time to use the software. In principle software with this licence can be installed on a single computer and allow different people connect to it and use software at different times.
Site licence is a licence allowing use the software by multiple numbers of users in the site, simultaneously, on multiple computers.
A research group licence allows any member of the group holding the licence to use the program.
