Now you can download from our website a presentation made at GEC AVS conferences: Dr. James Munro, 7 Oct 4.30 pm, “Simulations of an Ar/HBr/O2 microwave source etch process and the effect of SiBr and SiBr2 cross-sections on computed etch-profiles” Dr. James Munro, 21 Oct 2.20pm. “Molecular Cross-Section Calculations Enabling Etch-Profile Simulations of a Microwave [...]

We are pleased to announce that Quantemol representatives will be attending 3 major conferences in the upcoming month: Dr James Munro, lead plasma physicist software developer, will be attending: GEC & ICRP 2010, Paris, 4-8 Oct 2010. Dr. James Munro, 7 Oct 4.30 pm, “Simulations of an Ar/HBr/O$_2$ microwave source etch process and the effect [...]